B.I.Stepanov Institute of Physics of the National Academy of Sciences of Belarus offers consumers laser-optical inspection systems for surface inspection of polished wafers from semiconductor and dielectric materials under a manufacturing agreement and is looking for partners interested in a distribution services agreement.

B.I.Stepanov Institute of Physics of the National Academy of Sciences of Belarus offers consumers laser-optical inspection systems for surface inspection of polished structured and unstructured wafers from semiconductor and dielectric materials (silicon, germanium, gallium arsenide, sapphire), including those with epitaxial layer, for purpose of detection local defects caused by a violation of crystalline structure (growth defects), odd particles (dust, resist, solvents) and violation of integrity of technological layers (scratches).

Laser-optical inspection system contains:
* illumination module;
* scanning module;
* modules for imaging and registration of submicron defects;
* control unit and power management controller.

Inspection system software allows statistical processing of measurement results with counting number and analysis of defect types and sizes.

Laser-optical inspection system has following functions:
* autofocus;
* display in dark and light fields;
* determination of surface mattness;
* display of wafer with various resolution;
* automatic calculation of statistics of defect distribution by size and type;
* automatic scanning of entire wafer in high-speed and step-by-step modes;
* automatic saving of measurement results and images to disk or removable data storage;
* automatic recognition of defect type (growth defect, introduced defect, scratch, contamination);
* interactive navigation with a detailed high resolution (up to 200 nm) observation of wafer section.

Inspection system options:
* led illumination;
* digital microscope;
* removable microlenses: 10x, 20x, 50x;
* symmetrical angular laser illumination;
* integrated photoluminescence channel;
* up to four channels of scattered radiations registration;
* polarization contrast (suppression of scattering from roughness of surface);
* loading and unloading of wafers - manual mode or from SMIF container.

Registered information:
* color-coded surface matte map;
* map of integrated photoluminescence;
* histogram of particles by size and type;
* map of surface defects with defects color coding by size and type;
* images of wafer sections with resolution of 500 (up to 200 nm) in dark and light fields.

Specifications:


Application area: surface inspection of polished wafers used for creation of micro- and microwave electronics.

B.I.Stepanov Institute of Physics offers partners:
* laser-optical inspection systems for surface inspection of polished wafers from semiconductor and dielectric materials under a manufacturing agreement;
* laser-optical inspection systems for surface inspection of polished wafers from semiconductor and dielectric materials under a distribution services agreement.

Catalog of developments & services of «B.I. Stepanov Institute of Physics» 2022, pp.28-29.

Catalog «World-class developments of the National Academy of Sciences of Belarus for the period 2020-2022», pp.102-104 (in Russian).

The advantage of created laser-optical inspection system, in comparison with analogs, is that its software allows to carry out statistical processing of measurement results not only with counting number of defects, but also with construction of map of defect localization and analysis of types and sizes of defects.

Import substitution of laser-optical inspection systems from companies:
«MueTec Automatisierte Mikroskopie und Messtechnik GmbH» (Germany);
«KLA Corporation» (USA).

Laser-optical inspection systems is used at the enterprises of CIS countries (JSC «Integral» and CJSC «Svetlana-Rost»).

Smirnov, A. G., Ryzhevich, A. A., Agashkov, A. V. The working model of device for detection of surface and near-surface defects of small sizes / A. G. Smirnov, A. A. Ryzhevich, A. V. Agashkov // Instrument Engineering-2017: Proceedings of the 10th International Scientific and Technical Conference, Minsk, 1-3 November 2017. - Minsk : BNTU, 2017. - С. 253-254.

The B.I. Stepanov Institute of Physics is the leading interdisciplinary research institution in the field of physics in the Republic of Belarus. The directions of scientific research and development of the Institute are currently:
* Laser physics, development and creation of laser systems and technologies for medicine, ecology, industry, metrology and information protection;
* Physical and nonlinear optics, the disclosure and use of the patterns of propagation of high-power laser radiation in various media;
* Optical spectroscopy, development and application of methods and instruments for studying the properties and structure of various materials, including biotissues;
* Nanooptics and Nanomaterials;
* Quantum optics, investigation of quantum properties of electromagnetic radiation in computer science and cryptography;
* Investigation of the structure and properties of atomic-molecular structures and the creation of new optical materials, systems, instruments and technologies on this base;
* Plasma physics and plasma technologies: investigation of the plasma interaction with fields and matter; development and application of methods for plasma diagnostics, development of technological applications of gas-discharge and laser plasma
* Micro- and optoelectronics: LED technology, solar cells, microwave technology, microelectromechanical and sensor systems and devices;
* Physics of Fundamental Interactions and Nuclear Reactions - Investigating the Structure of the Microcosm and the Universe.

The B.I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus has scientific contacts with many countries. At present, more than 50 agreements on scientific and technical cooperation have been signed with organizations from 15 countries.

The Institute develops, manufactures and supplies laser and optical instruments for various purposes, as well as innovative components for laser technology, to many countries of the world (Russia, China, Germany, France, the United States, Saudi Arabia, India, etc.).

Consumers interested in purchasing laser-optical inspection systems for surface inspection of polished wafers from semiconductor and dielectric materials under a manufacturing agreement.

Partners interested in purchasing laser-optical inspection systems for surface inspection of polished wafers from semiconductor and dielectric materials under a distribution services agreement.