Minsk Research Institute of Radiomaterials of the National Academy of Sciences of Belarus offers consumers heat flux sensors under a manufacturing agreement and is looking for partners interested in a distribution services agreement.

OJSC "Minsk Research Institute of Radiomaterials" of the National Academy of Sciences of Belarus together with A.V.Luikov Heat and Mass Transfer Institute of the NAS of Belarus has developed heat flux sensors on the Seebeck effect, designed to measure power of radiant energy flow with low energy consumption.

Heat flux sensors are manufactured using planar technology with double-sided lithography.

The sensors are based on MEMS-receivers with sensing elements based on micro-thermocouples. Such elements include a dielectric membrane with high heat absorption and several micro-thermocouples connected in series, «hot» junctions of which are located on membrane, and «cold» ones have good thermal contact with substrate, which allows to achieve maximum possible operating characteristics.

The material used to create the sensor crystal membranes is non-stoichiometric silicon nitride (Si_xN_y), which has a lower internal stress than commonly used silicon nitride (Si₃N₄).

Heat flux sensors are characterized by:
* low thermal inertia;
* high sensitivity;
* linearity of transformation;
* low power consumption;
* high radiation resistance;
* wide range of radiant energy measurements;
* high speed of reaction to thermal influence.

Specifications:

Spectral measurement range, microns	0.1..14
Optical radiation power range, W/m2	0..4000
Sensitivity, V/W:
* for heat flow power of 0..500 W/m2	38.6..49.8
* for heat flow power of 500..4000 W/m2	93.9..104.3
Thermocouple resistance, kOm	4..100
Response time, s	0.04

Application areas:
* regulation of temperature processes, remote temperature measurement (turbine engines, medicine);
* selective measurement of radiant energy in certain spectral ranges;
* orientation systems for small spacecraft;
* systems for ground testing of spacecraft;
* missile guidance systems, etc.

OJSC "Minsk Research Institute of Radiomaterials" offers partners:
* heat flux sensors under a manufacturing agreement;
* heat flux sensors under a distribution services agreement.

More information, see article 1 and article 1 (in Russian).

Catalog «Developments of the National Academy of Sciences of Belarus of the world level for the period 2020-2022», pp.158-159 (in Russian).

Link to the product on Minsk Research Institute of Radiomaterials site.

The technical advantages lie in use of planar technology and double-sided photolithography, which allows to increase sensitivity and reduce mass and dimensional characteristics of heat flux sensor compared to known solutions.

Import substitution of heat flux sensors:
Vatell TG9000 («Vatell Corporation», USA);
DRTP-15 (FSUE «VNIIFTRI», Russian Federation);
HFS («Tempsens Instrument Pvt. Ltd.», India, Germany, Indonesia).

Patent of the Republic of Belarus for utility model № 12193 dated 30.12.2019 «Thermoelectric radiation receiver»
Patent of the Republic of Belarus for utility model № 12665 dated 30.08.2021 «Thermoelectric radiation receiver»

Kernasovskiy, Yu.M., Taratyn, I.A., Ryzhkovskaya, D.S., Chakukov, R.F., Filatov, S.A., Kuchinskii G.S., Batyrev, E.V. «Developing the design and manufacturing technniques for test sensitive element of thermal stream sensor based on Seebeck's effect» / Yu.M. Kernasovskiy, I.A. Taratyn, D.S. Ryzhkovskaya, R.F. Chakukov, S.A. Filatov, G.S. Kuchinskii, E.V. Batyrev // Nanoindustry. – 2019. – No. S (89). – pp. 577-578.

Taratyn, I.A., Kernasovskiy, Yu.M., Filatov, S.A. «Wide-range heat flow MEMS sensors» / I.A. Taratyn, Yu.M. Kernasovskiy, S.A. Filatov // 14th International Scientific and Technical Conference «Instrumentation-2021». – pp. 133-134.

Kernasovskiy, Yu.M. «Developing the design and manufacturing technniques for test sensitive element of thermal stream sensor based on Seebeck's effect» / Yu.M. Kernasovskiy // International forum «Microelectronics-2018»; 4th International Scientific Conference «Electronic Component Base and Microelectronic Modules»: collection of abstracts, Alushta, October 1-6, 2018 – pp. 520-524.

The specialization of the institute includes the following main areas:
* development and production of the element base and functional units of microwave technology (solid-state microwave monolithic integrated circuits - low-noise amplifiers and power amplifiers, protective devices, switches, attenuators, frequency converters; microwave modules, etc.);
* development and production of optoelectronic components and modules based on them (photodetectors, light emitting diodes, semiconductor lasers, receiving and transmitting optical modules);
* production of materials for semiconductor production - gallium arsenide substrates of the "epi-ready" standard;
* development of sensor technology, modules and systems (sensors for inclination, pressure, acceleration, electronic compass, etc.);
* development and production of medical equipment.

The research and production base of the institute includes dedicated equipment which allows to develop and perform a full cycle of technological operations for the manufacture of microwaves, optoelectronic components, sensors of physical quantities based on microelectromechanical systems, equipment for the manufacture of medical products - Glucosen sensors etc. In particular, the equipment allows cutting semiconductor ingots of A3B5 compounds (GaAs, InP, GaN, etc.), grinding and polishing wafers, epitaxial growth, thermal diffusion and implantation of dopants, microcircuit packaging, control of their parameters, etc.

The Institute has a licensed software for electrodynamic calculations, its own library of standard elements, methods for monitoring and testing microwave components in the C, S, L, X, K wavelength ranges, electronic lithography equipment with a resolution of 100 nm, which provides a modern level of design standards.

As part of the specialization, the development of technologies, components and devices for various radio-electronic systems is carried out: radar systems, fiber-optic communication lines, laser rangefinders, systems for leveling and orientation of objects, control systems, guidance and navigation, etc.

Consumers interested in purchasing heat flux sensors under a manufacturing agreement.

Partners interested in purchasing heat flux sensors under a distribution service agreement.