The microtool for manufacture of printedcircuit boards of microelectronics and products of exact mechanics.
Technical and economic indicators:
Coverings are put on micro drills in vacuum by a method of sedimentation of the
accelerated pulse carbon plasma.
1. Thickness, micron – 0,5÷1;
2. Hardness, ГПа – 30–60;
3. Absence of sticking of fragments of a processed material;
4. Improvements of quality of micro apertures and milled paths;
It ncrease of term of operation in 2,5 times.