Appointment:
Cathodes, targets, the details of industrial equipment sprayed on installations arc,
magnetron deposition of coverings.
Technical characteristics:
Manufacturing techniques are based on electron beam fusion of chemically active,
refractory metals in vacuum that allows to exclude pollution of melted metal. The technology of usual and high–speed diffusive welding is used and moulding in the
conditions of vacuum.

-The equipment of small capacity (ten in kilowatts) is used; -Sources of pollution of
melted metal are excluded;
-Controllable structure of a received material;
- Possibility of realisation of restoration of the worn out cathodes, targets.
Field of application:
Manufacture of microelectronics,
integrated microcircuits.